Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS (2012)

First Author: Guenter Moebus (Author)
Attributed to:  Nanoparticle and Element Distribution Studies of Ion Implantation Processes funded by EPSRC

Abstract

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Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract