Control of stress in tantalum thin films for the fabrication of 3D MEMS structures (2013)
Attributed to:
A multichannel adaptive integrated MEMS/CMOS microphone
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.4824697
Publication URI: http://dx.doi.org/10.1116/1.4824697
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Issue: 6