Scribe-cleave-passivate (SCP) slim edge technology for silicon sensors (2013)

First Author: Fadeyev V
Attributed to:  Flat panel technology for XFEL funded by STFC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.nima.2013.03.046

Publication URI: http://dx.doi.org/10.1016/j.nima.2013.03.046

Type: Journal Article/Review

Parent Publication: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment