Spin-on doping of germanium-on-insulator wafers for monolithic light sources on silicon (2015)

First Author: Al-Attili A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.7567/jjap.54.052101

Publication URI: http://dx.doi.org/10.7567/jjap.54.052101

Type: Journal Article/Review

Parent Publication: Japanese Journal of Applied Physics

Issue: 5