Growth of complex SiGe/Ge superlattices by reduced pressure chemical vapour deposition at low temperature (2015)

First Author: Halpin J

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0268-1242/30/11/114009

Publication URI: http://dx.doi.org/10.1088/0268-1242/30/11/114009

Type: Journal Article/Review

Parent Publication: Semiconductor Science and Technology

Issue: 11