Fabrication and characterisation of suspended microstructures of tantalum (2017)
Attributed to:
A multichannel adaptive integrated MEMS/CMOS microphone
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/27/1/015020
Publication URI: http://dx.doi.org/10.1088/0960-1317/27/1/015020
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 1