Thick film hydrogen silsesquioxane planarization for passive component technology associated with electronic-photonic integrated circuits (2019)
Attributed to:
Optically controlled THz phased array antennas
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.5123286
Publication URI: http://dx.doi.org/10.1116/1.5123286
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Issue: 6