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Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators (2021)

First Author: Pandit M

Attributed to: Improving reservoir management funded by NERC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2021.3077633

Publication URI: http://dx.doi.org/10.1109/jmems.2021.3077633

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 4