OPTIMIZING REMOTE PLASMA SOURCES FOR SELECTIVE ETCHING (2016)
Attributed to:
UK R-matrix Atomic and Molecular Physics HPC Code Development Project (UK-RAMP)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Type: Conference/Paper/Proceeding/Abstract
Parent Publication: 2016 43RD IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS)