Automated alignment in mask-free photolithography enabled by micro-LED arrays (2021)
Attributed to:
Light-controlled manufacturing of semiconductor structures: a platform for next generation processing of photonic devices
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1049/ell2.12244
Publication URI: http://dx.doi.org/10.1049/ell2.12244
Type: Journal Article/Review
Parent Publication: Electronics Letters
Issue: 19