Porous silicon bulk acoustic wave resonator with integrated transducer (2012)

First Author: Aliev G

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1186/1556-276x-7-378

Publication URI: http://dx.doi.org/10.1186/1556-276x-7-378

Type: Journal Article/Review

Parent Publication: Nanoscale Research Letters

Issue: 1