Ion Implantation and Electrical Annealing for Trimming Silicon MZIs and Facilitating One-Time Programmable Photonic Circuits (2019)

First Author: Chen X
Attributed to:  Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/group4.2019.8853925

Publication URI: http://dx.doi.org/10.1109/group4.2019.8853925

Type: Conference/Paper/Proceeding/Abstract

ISSN: 19492081