In-situ monitoring of microwave plasma-enhanced chemical vapour deposition diamond growth on silicon using spectroscopic ellipsometry (2023)
Attributed to:
Integrated GaN-Diamond Microwave Electronics: From Materials, Transistors to MMICs
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.carbon.2022.10.049
Publication URI: http://dx.doi.org/10.1016/j.carbon.2022.10.049
Type: Journal Article/Review
Parent Publication: Carbon
ISSN: 00086223