GaN-on-Si membranes for power device applications: Stress evolution throughout fabrication (2022)
Attributed to:
Integrated GaN-Diamond Microwave Electronics: From Materials, Transistors to MMICs
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Type: Other
Parent Publication: 2022 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2022