Argon Cluster-Ion Sputter Yield: Molecular Dynamics Simulations on Silicon and an Equation for Estimating Total Sputter Yield (2017)
Attributed to:
University of Newcastle - Equipment Account
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.1710.00367
Publication URI: https://arxiv.org/abs/1710.00367
Type: Preprint