Microwave plasma modelling in clamshell chemical vapour deposition diamond reactors (2021)
Attributed to:
Integrated GaN-Diamond Microwave Electronics: From Materials, Transistors to MMICs
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.2111.10258
Publication URI: https://arxiv.org/abs/2111.10258
Type: Other