A novel pitch evaluation of one-dimensional gratings based on a cross-correlation filter (2014)
Attributed to:
EPSRC Centre for Innovative Manufacturing in Advanced Metrology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0957-0233/25/4/044007
Publication URI: http://dx.doi.org/10.1088/0957-0233/25/4/044007
Type: Journal Article/Review
Parent Publication: Measurement Science and Technology
Issue: 4