Low frequency tantalum electromechanical systems for biomimetical applications (2011)
Attributed to:
A multichannel adaptive integrated MEMS/CMOS microphone
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.3662408
Publication URI: http://dx.doi.org/10.1116/1.3662408
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Issue: 6