Tilt scanning interferometry: a numerical simulation benchmark for 3D metrology. (2009)

First Author: Galizzi GE
Attributed to:  *Depth-resolved phase-contrast optical metrology in life sciences and engineering funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.48.003184

PubMed Identifier: 19516362

Publication URI: http://europepmc.org/abstract/MED/19516362

Type: Journal Article/Review

Volume: 48

Parent Publication: Applied optics

Issue: 17

ISSN: 1559-128X