Compound Semiconductor Underpinning Equipment
Lead Research Organisation:
CARDIFF UNIVERSITY
Department Name: Sch of Engineering
Abstract
Compound Semiconductor (CS) materials are a Key Enabling Technology at the heart of modern society. They are central to the development of, for example, the 5G network, new energy efficient lighting, smart phones, satellite communications systems, power electronics for the next generation of electric vehicles and new imaging techniques. Simply put, these technologies support our connected world, our health, our security and the environment. The next generation of these technologies can only be achieved with a step change in CS manufacturing and we aim to the UK at the centre of this CS manufacturing research. This is not only important activity in its own right but will also support systems researchers in all of these important fields.
The step change will be achieved by applying the manufacturing disciplines and approaches of Silicon to Compound Semiconductors and by combining CS with Silicon. This includes developing integrated epitaxial growth and processing with critical yield and reliability analysis; establishing new standards for CS device production, with a guaranteed number of wafer starts per week for key statistical based process control and development via IT infrastructure; solving the scientific and manufacturing challenges in wafer size scale-up combining large scale, 150-200mm diameter growth and fabrication for GaAs based and GaN based materials and apply this to existing and developed advanced processes; introducing a multi-project wafer culture (as is the norm in the silicon world) to share costs and encourage the widespread use of larger wafers by academics and SMEs.
Critical to this approach is the characterisation equipment, which can be used in-line (during the manufacturing process) and over the larger (up to 200mm diameter) CS wafers we will utilise. This proposal is for this characterisation equipment to add to the large investment already made by Cardiff University and partners in epitaxial growth and fabrication infrastructure and equipment. We also ask for apparatus to allow high quality insulating layers to be deposited, which will enable the multi-project wafer approach to produce world leading performance, for access by our UK based circuit and system designers.
The step change will be achieved by applying the manufacturing disciplines and approaches of Silicon to Compound Semiconductors and by combining CS with Silicon. This includes developing integrated epitaxial growth and processing with critical yield and reliability analysis; establishing new standards for CS device production, with a guaranteed number of wafer starts per week for key statistical based process control and development via IT infrastructure; solving the scientific and manufacturing challenges in wafer size scale-up combining large scale, 150-200mm diameter growth and fabrication for GaAs based and GaN based materials and apply this to existing and developed advanced processes; introducing a multi-project wafer culture (as is the norm in the silicon world) to share costs and encourage the widespread use of larger wafers by academics and SMEs.
Critical to this approach is the characterisation equipment, which can be used in-line (during the manufacturing process) and over the larger (up to 200mm diameter) CS wafers we will utilise. This proposal is for this characterisation equipment to add to the large investment already made by Cardiff University and partners in epitaxial growth and fabrication infrastructure and equipment. We also ask for apparatus to allow high quality insulating layers to be deposited, which will enable the multi-project wafer approach to produce world leading performance, for access by our UK based circuit and system designers.
Planned Impact
Societal
Compound Semiconductor materials are a Key Enabling Technology underpinning the operation of the internet and enabling emerging megatrends such as Smart Phone usage, satellite communications/GPS, Direct Broadcast TV, energy efficient lighting, efficient solar power generation, advanced healthcare and ground breaking biotechnology. Simply put these technologies support our connected world and the future health of the planet.
Economic
Our vision is to ensure that the UK's research strength in compound semiconductors will be embedded in manufacturable approaches so the UK can commercially address the opportunities that compound semiconductors will provide. The global market for compound semiconductors is currently worth around $33.7Bn, with a compound annual growth rate of 17.3%, and underpins 100s of billions dollar related industries from telecom to automotive. Expanding commercial activity in the compound semiconductor sector will provide an important boost for the UK economy and maintain UK advanced manufacturing competiveness. A good example of this is Cardiff headquartered IQE Plc, the global leader in supplying compound semiconductor materials (~£130M turnover).
Our aim is to strengthen the relationship between academia and industry and this will be achieved by 1) changing the mind set of researchers to start from solutions that allow rapid translation to production by providing access to production scale and research tools that are functionally similar along with highly skilled support for the tools and processes; 2) Co-location of research and industry staff to maximise cross fertilisation of ideas, techniques and approach in an environment that supports interaction.
The EPSRC Manufacturing Hub funded translation / business developer together with staff from the Compound Semiconductor Centre will support SMEs through product prototyping, IP generation, skills development and training. They will help bid for external grants, coordinate partner forums, form networks and prepare roadmaps.
Skills Base
The cutting edge equipment operated as part of a manufacturing process offers an excellent training opportunity, inculcating a manufacturing mind set in a UK strategically relevant high technology field. We will embed technological excellence and the latest manufacturing approaches in UK industry. PDRAs and students will participate in high level meetings with the commercial organisations and will work alongside R&D staff from industry. There will also be a direct economic impact via the provision of skilled workers to relevant companies, a feature of our previous projects.
Outreach
The Hub funded outreach specialist will promote the reach and importance of compound semiconductors and the strategy and activity of the Hub in manufacturing. The specialist and the team will address audiences from school students to stakeholders to politicians. Resources are available from the Hub to train researchers and staff in media interactions and outreach using a range of innovative formats such as performance and theatre production skills.
Knowledge Dissemination
Via conferences such as UK Semiconductors and Photonics West, the latter providing an excellent mix of science and commercial activity. We will publish in open access peer reviewed journals such as those from both the Nature and IEEE stables.
Our aim throughout will be to engage new partners and we will hold workshops, use feasibility funding, actively canvas and make use of our existing partners and contacts, relevant KTNs, the Welsh Optoelectronics Forum and other appropriate bodies to connect as widely as possible
Compound Semiconductor materials are a Key Enabling Technology underpinning the operation of the internet and enabling emerging megatrends such as Smart Phone usage, satellite communications/GPS, Direct Broadcast TV, energy efficient lighting, efficient solar power generation, advanced healthcare and ground breaking biotechnology. Simply put these technologies support our connected world and the future health of the planet.
Economic
Our vision is to ensure that the UK's research strength in compound semiconductors will be embedded in manufacturable approaches so the UK can commercially address the opportunities that compound semiconductors will provide. The global market for compound semiconductors is currently worth around $33.7Bn, with a compound annual growth rate of 17.3%, and underpins 100s of billions dollar related industries from telecom to automotive. Expanding commercial activity in the compound semiconductor sector will provide an important boost for the UK economy and maintain UK advanced manufacturing competiveness. A good example of this is Cardiff headquartered IQE Plc, the global leader in supplying compound semiconductor materials (~£130M turnover).
Our aim is to strengthen the relationship between academia and industry and this will be achieved by 1) changing the mind set of researchers to start from solutions that allow rapid translation to production by providing access to production scale and research tools that are functionally similar along with highly skilled support for the tools and processes; 2) Co-location of research and industry staff to maximise cross fertilisation of ideas, techniques and approach in an environment that supports interaction.
The EPSRC Manufacturing Hub funded translation / business developer together with staff from the Compound Semiconductor Centre will support SMEs through product prototyping, IP generation, skills development and training. They will help bid for external grants, coordinate partner forums, form networks and prepare roadmaps.
Skills Base
The cutting edge equipment operated as part of a manufacturing process offers an excellent training opportunity, inculcating a manufacturing mind set in a UK strategically relevant high technology field. We will embed technological excellence and the latest manufacturing approaches in UK industry. PDRAs and students will participate in high level meetings with the commercial organisations and will work alongside R&D staff from industry. There will also be a direct economic impact via the provision of skilled workers to relevant companies, a feature of our previous projects.
Outreach
The Hub funded outreach specialist will promote the reach and importance of compound semiconductors and the strategy and activity of the Hub in manufacturing. The specialist and the team will address audiences from school students to stakeholders to politicians. Resources are available from the Hub to train researchers and staff in media interactions and outreach using a range of innovative formats such as performance and theatre production skills.
Knowledge Dissemination
Via conferences such as UK Semiconductors and Photonics West, the latter providing an excellent mix of science and commercial activity. We will publish in open access peer reviewed journals such as those from both the Nature and IEEE stables.
Our aim throughout will be to engage new partners and we will hold workshops, use feasibility funding, actively canvas and make use of our existing partners and contacts, relevant KTNs, the Welsh Optoelectronics Forum and other appropriate bodies to connect as widely as possible
Organisations
- CARDIFF UNIVERSITY (Lead Research Organisation)
- Compound Semiconductor Centre (Collaboration)
- ICS (Collaboration)
- University of California, Santa Barbara (Collaboration)
- National Physical Laboratory (Collaboration)
- Kubos Semiconductors (Collaboration)
- Computer Simulation Technology (Collaboration)
- Heriot-Watt University (Collaboration)
- The Hong Kong University of Science and Technology (Collaboration)
- Compound Semiconductor Technologies Global (Collaboration)
- SWANSEA UNIVERSITY (Collaboration)
- Compound Semiconductor Centre (Project Partner)
- IQE PLC (Project Partner)
People |
ORCID iD |
Hywel Thomas (Principal Investigator) | |
Peter Smowton (Co-Investigator) |
Publications

Albeladi F
(2023)
Design and characterisation of multi-mode interference reflector lasers for integrated photonics
in Journal of Physics D: Applied Physics


Baker J
(2021)
Quick Fabrication VCSELs for Characterisation of Epitaxial Material
in Applied Sciences





Bishop S
(2022)
Evanescent-field assisted photon collection from quantum emitters under a solid immersion lens
in New Journal of Physics
Description | We have added metrology capability to our current facilities, begun to develop manufacturing processes for compound semiconductor devices and integrated circuits (supporting high priority areas in Communications and Sensors), supported the Future Compound Semiconductor Manufacturing Hub (CS Hub) through increased collaboration, developed an open access facility for the UK academic community to support the translation of research to manufacturing scale. |
Exploitation Route | Equipment will be used to develop collaborations with industry and academia. |
Sectors | Digital/Communication/Information Technologies (including Software) Electronics Manufacturing including Industrial Biotechology |
Description | The equipment purchased has been essential in enhancing capability for both the Future Compound Semiconductor Manufacturing Hub (CS Hub) and the Institute for Compound Semiconductors (ICS) at Cardiff University. This has allowed us to strength our working relationships with existing industrial and academic collaborators and forge new working relations with in industry and academia. For the CS Hub the equipment has been instrumental in attracting research funding, generating research and conference publications and the growth of new research opportunities. New customers have been attracted to the TRAC ICS facility as the equipment forms an integral component of the ICS capability and has assisted in developing the profile of ICS. |
Description | MSc Module ENT610 |
Geographic Reach | National |
Policy Influence Type | Influenced training of practitioners or researchers |
Description | Semiconductor parameter analyzer & vector network analyzer & light wave analyzer training |
Geographic Reach | Local/Municipal/Regional |
Policy Influence Type | Influenced training of practitioners or researchers |
Impact | training of other members in the use of the systems and software and so would expect electronic device use to increase this year. |
Description | ATLAS' Advanced manufacturing Techniques for semiconductor LASers |
Amount | £884,971 (GBP) |
Funding ID | 82371 |
Organisation | Government of Wales |
Sector | Public |
Country | United Kingdom |
Start | 01/2021 |
End | 10/2022 |
Description | EPSRC Centre for Doctoral Training (Compound Semiconductor Manufacturing CDT) |
Amount | £6,271,740 (GBP) |
Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
Sector | Public |
Country | United Kingdom |
Start | 03/2019 |
End | 10/2027 |
Description | European Space Agency (Single-chip Ka-band doherty amplifier |
Amount | £70,886 (GBP) |
Organisation | European Space Agency |
Sector | Public |
Country | France |
Start | 03/2018 |
End | 02/2020 |
Description | Innovate UK Kairos |
Amount | £139,442 (GBP) |
Organisation | Innovate UK |
Sector | Public |
Country | United Kingdom |
Start | 11/2018 |
End | 03/2021 |
Description | Non-linear (large signal) Millimetre-wave Devices, Circuits and Systems On-Wafer Characterization Facility |
Amount | £1,459,152 (GBP) |
Funding ID | EP/S01005X/1 |
Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
Sector | Public |
Country | United Kingdom |
Start | 01/2019 |
End | 12/2019 |
Description | WEFO (ACNM Project) |
Amount | £232,751 (GBP) |
Organisation | Government of Wales |
Department | Welsh European Funding Office |
Sector | Public |
Country | United Kingdom |
Start | 02/2019 |
End | 01/2020 |
Description | WEFO (Asset project) |
Amount | £84,665 (GBP) |
Organisation | Government of Wales |
Department | Welsh European Funding Office |
Sector | Public |
Country | United Kingdom |
Start | 01/2019 |
End | 12/2020 |
Title | Bespoke ICCAP measurement routines t |
Description | Bespoke ICCAP measurement routines tailored to specific device geometry and semiconductor technology |
Type Of Material | Improvements to research infrastructure |
Year Produced | 2019 |
Provided To Others? | No |
Impact | none yet |
Title | ICS database of VCSEL wafer results |
Description | CS database of VCSEL wafer results |
Type Of Material | Database/Collection of data |
Year Produced | 2019 |
Provided To Others? | No |
Impact | Contributes to ICS database of VCSEL wafer results |
Description | DILAN project |
Organisation | Compound Semiconductor Centre |
Country | United Kingdom |
Sector | Academic/University |
PI Contribution | Working on the DILAN project to develop new processes for improved laser manufacture and function. Subsequently working on continuation projects to secure additional funding with the same collaborative team. Use of the axio imager and spectrum analyser to inform process development. |
Collaborator Contribution | Working on the DILAN project to develop new processes for improved laser manufacture and function. |
Impact | New grant application for SMART Expertise funding is in process. |
Start Year | 2017 |
Description | DILAN project |
Organisation | Computer Simulation Technology |
Country | Germany |
Sector | Private |
PI Contribution | Working on the DILAN project to develop new processes for improved laser manufacture and function. Subsequently working on continuation projects to secure additional funding with the same collaborative team. Use of the axio imager and spectrum analyser to inform process development. |
Collaborator Contribution | Working on the DILAN project to develop new processes for improved laser manufacture and function. |
Impact | New grant application for SMART Expertise funding is in process. |
Start Year | 2017 |
Description | DILAN project |
Organisation | Swansea University |
Country | United Kingdom |
Sector | Academic/University |
PI Contribution | Working on the DILAN project to develop new processes for improved laser manufacture and function. Subsequently working on continuation projects to secure additional funding with the same collaborative team. Use of the axio imager and spectrum analyser to inform process development. |
Collaborator Contribution | Working on the DILAN project to develop new processes for improved laser manufacture and function. |
Impact | New grant application for SMART Expertise funding is in process. |
Start Year | 2017 |
Description | Heriot Watt University, Institute of Photonics and Quantum Sciences (ultrafast lasers and photonic systems). |
Organisation | Heriot-Watt University |
Country | United Kingdom |
Sector | Academic/University |
PI Contribution | performing measurements which complemented those taken on the equipment |
Collaborator Contribution | performing measurements which complemented those taken on the equipment |
Impact | None yet |
Start Year | 2019 |
Description | Hong Kong University of Science |
Organisation | The Hong Kong University of Science and Technology |
Country | Hong Kong |
Sector | Academic/University |
PI Contribution | 1.55um QDs on Si & InP: Characterisation of devices. Use of axio imager and spectrum analyser equipment to characterise devices. |
Collaborator Contribution | 1.55um QDs on Si & InP: Provision of devices. |
Impact | Results are have been submitted as an abstract for an international conference. |
Start Year | 2018 |
Description | ICS Ltd |
Organisation | ICS |
Country | United Kingdom |
Sector | Private |
PI Contribution | Characterisation of VCSELs. Use of semiconductor parameter analyser and vector network analyser and lightwave analyser purchased via the underpinning equipment award for characterisation purposes. |
Collaborator Contribution | Material provided for characterisation. |
Impact | Outcomes include research results on VCSELs that will be prepared for conference presentation/publication. In addition, results have contributed to the successful application for further Innovate UK funding via the Kairos project. |
Start Year | 2018 |
Description | Kubos |
Organisation | Kubos Semiconductors |
Country | United Kingdom |
Sector | Private |
PI Contribution | a mask set developed o and a process developed by ICS. ICS is doing approximately one LED processing run per 6 weeks. These devices are then measured on the auto prober system to give I/V characteristics of 162 devices per samples. |
Collaborator Contribution | Providing mask |
Impact | No outcomes yet. |
Start Year | 2020 |
Description | MacV Project |
Organisation | Compound Semiconductor Centre |
Country | United Kingdom |
Sector | Academic/University |
PI Contribution | Working on the production of VCSELs for miniaturised atomic clocks. Use of the axio imager, semiconductor parameter analyser & vector network analyser & lightwave analyser as well as the electro-optical characterisation & six axis positioning system to develop VCSELs. |
Collaborator Contribution | Working on the production of VCSELs for miniaturised atomic clocks. |
Impact | Outputs include further funding via the Innovate UK Kairos project. |
Start Year | 2017 |
Description | MacV Project |
Organisation | Compound Semiconductor Technologies Global |
Country | United Kingdom |
Sector | Private |
PI Contribution | Working on the production of VCSELs for miniaturised atomic clocks. Use of the axio imager, semiconductor parameter analyser & vector network analyser & lightwave analyser as well as the electro-optical characterisation & six axis positioning system to develop VCSELs. |
Collaborator Contribution | Working on the production of VCSELs for miniaturised atomic clocks. |
Impact | Outputs include further funding via the Innovate UK Kairos project. |
Start Year | 2017 |
Description | MacV Project |
Organisation | National Physical Laboratory |
Country | United Kingdom |
Sector | Academic/University |
PI Contribution | Working on the production of VCSELs for miniaturised atomic clocks. Use of the axio imager, semiconductor parameter analyser & vector network analyser & lightwave analyser as well as the electro-optical characterisation & six axis positioning system to develop VCSELs. |
Collaborator Contribution | Working on the production of VCSELs for miniaturised atomic clocks. |
Impact | Outputs include further funding via the Innovate UK Kairos project. |
Start Year | 2017 |
Description | UCSB collaboration |
Organisation | University of California, Santa Barbara |
Country | United States |
Sector | Academic/University |
PI Contribution | Cardiff worked on material provided by UCSB. Equipment provided by the CS underpinning equipment award was essential to the process. |
Collaborator Contribution | Material was provided by UCSB. |
Impact | No outcomes are known. |
Start Year | 2018 |
Description | Official clean room opening |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | International |
Primary Audience | Industry/Business |
Results and Impact | Equipment formed an integral component of the official opening of the Institute for Compound Semiconductors (ICS) Clean Room facility. This was attended by about 40 industry collaborators and academics. The facilities were promoted and capability advertised. This promoted links between primarily members of the CS Cluster as well as other businesses and ICS. |
Year(s) Of Engagement Activity | 2018 |
Description | UK Universities and Science Minister Visit |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | National |
Primary Audience | Policymakers/politicians |
Results and Impact | The Institute for Compound Semiconductors (ICS) were visited by UK Universities and Science Minister Chris Skidmore MP. The Minister viewed the equipment purchased under the underpinning equipment award and was informed of the essential capability enhancements with potential effects on the UK economy in the long term. |
Year(s) Of Engagement Activity | 2019 |
Description | Visit by Chinese government official |
Form Of Engagement Activity | Participation in an open day or visit at my research institution |
Part Of Official Scheme? | No |
Geographic Reach | International |
Primary Audience | Policymakers/politicians |
Results and Impact | Chinese government officials visited the Institute for Compound Semiconductors (ICS) Clean Room facility in order to view the capability offered. Questions were received afterwards and the profile of ICS was raised on an international level. |
Year(s) Of Engagement Activity | 2018 |