Cardiff University and Edwards Vacuum KTP 21_22 R5
Lead Participant:
CARDIFF UNIVERSITY
Abstract
_Development of a microwave plasma device for the destruction of green-house gases used for semiconductor fabrication. This approach reduces the environmental impact that would arise from the release of the gases themselves and would have a lower carbon footprint than the combustion technology currently employed._
Lead Participant | Project Cost | Grant Offer |
---|---|---|
CARDIFF UNIVERSITY | ||
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Participant |
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EDWARDS LIMITED | ||
EXETER COLLEGE |
People |
ORCID iD |
Paul Thomas (Project Manager) |