Single and Dual Rotatable Magnetrons

Lead Participant: GENCOA LIMITED

Abstract

Gencoa have made a very strong patent application disclosing new methods to improve
the way that the plasma is magnetically confined and the interaction with anodes (see Appendix
B). It is expected that the significant product and processes benefits of this innovation will open a
new market for Gencoa. It is also hoped that a 'side' benefit of these new concepts will be
reduced energy consumption and carbon footprint of these power 'hungry' production processes.
Gencoa have conducted extensive background research into the area and carried out an
informal survey of potential customers. The technique of two targets working as a pair with AC
power between the two for the deposition of dielectric coatings is an existing aspect of the
technology and has prior valid IPR. The patent application has been based on the feedback from
the market combined with the current problems and limitations with the existing technology.
The new methods employ asymmetric magnetic field designs and the use of magnetic guidance
of electrons into a receiving anode. The phenomenon of the asymmetric magnetic fields when
used with rotating targets to generate plasma for vacuum plasma processing and coating
deposition is novel and is the basis of the IPR. Simulations work completed indicates a good
chance of success, but the lack of any scientific and technical validation obviously impedes its
commercialisation. The aim of this feasibility study is therefore to thoroughly characterise and
refine Gencoa's new magnetic and anode design concepts. Significant outcomes of this project
will allow Gencoa to achieve important goals such as confirm the viability of the new technology,
gain the necessary scientific and technical knowledge for the development of new commercial
rotatable magnetrons and define their operational, technical and design requirements.
At the end of the project Gencoa will have a sound knowledge base for the development
of commercial products and have background information to help progress the prosecution of
any further patent applications. It is hoped that a subsequent 'development' project will follow the
feasibility study.

Lead Participant

Project Cost

Grant Offer

GENCOA LIMITED £226,894 £ 100,000

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