Quantum etch plasma simulation
Lead Research Organisation:
University College London
Department Name: Physics and Astronomy
Abstract
The project will produce a prototype Quantum-Etch system: a plasma etching model based on accurate quantum models. This etching program will allow academic and industrial researchers to pre-test major design changes in etching systems. The consequence will be a major efficiency gain for the semiconductor industry in designing industrial etching chambers allowing for the most suitable designs to be quickly identified and moved on to lab testing. Project outputs will include a Requirements Analysis following customer interviews, Development Roadmap, Prototype Quantum-Etch system and a detailed Business Plan which will be used to raise further finance for development and marketing.
Publications
A E Lynas-Gray
(2018)
Current State of Astrophysical Opacities: A White Paper
in Astronomical Society of the Pacific Conference Series
A Fazliev
(2010)
Computed knowledge base for description of information resources of water spectroscopy
in CEUR Workshop Proceedings
Ahmad N
(2010)
Boundary layer flow and heat transfer past a stretching plate with variable thermal conductivity
in International Journal of Non-Linear Mechanics
Al-Refaie A
(2015)
ExoMol line lists - VIII. A variationally computed line list for hot formaldehyde
in Monthly Notices of the Royal Astronomical Society
D A Garcia-Hernandez
(2018)
A New Near-IR C-2 Linelist for an Improved Chemical Analysis of Hydrogen-deficient, Carbon-rich Giants
in Astronomical Society of the Pacific Conference Series
Harvey A
(2007)
Electron re-scattering from H 2 and CO 2 using R-matrix techniques
in Journal of Modern Optics
Jonathan Tennyson
(2018)
The ExoMol Project: Molecular Opacity Calculations at University College London
in Astronomical Society of the Pacific Conference Series
Kelly Ross E. A.
(2010)
Theoretical determined water dimer spectra in the near IR and visible regions in the atmosphere
in ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Kelly Ross E. A.
(2010)
Using a vibrational averaging technique to understand the role of water dimers in atmospheric absorption
in ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
L Rutkowski
(2017)
Detection of OH and H2O in an atmospheric flame by near-infrared optical frequency comb spectroscopy
in Optics InfoBase Conference Papers
| Description | EU ENIAC |
| Amount | £284,000 (GBP) |
| Funding ID | EU ENIAC 120227 / TSB 600706 |
| Organisation | Innovate UK |
| Sector | Public |
| Country | United Kingdom |
| Start | 04/2010 |
| End | 03/2014 |
| Description | STFC CASE studentship |
| Amount | £95,000 (GBP) |
| Funding ID | ST/J002925 |
| Organisation | Science and Technologies Facilities Council (STFC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 10/2012 |
| End | 09/2016 |
| Description | STFC CASE studentship |
| Amount | £95,000 (GBP) |
| Funding ID | ST/K004069 |
| Organisation | Science and Technologies Facilities Council (STFC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 10/2013 |
| End | 09/2017 |
| Description | Surface Technology Systems Plc |
| Organisation | Surface Technology Systems Plc |
| Country | United Kingdom |
| Sector | Private |
| Start Year | 2007 |
| Company Name | Quantemol Ltd |
| Description | Software and consultancy. Quantemol has customers in a number of sectors including academia but the biggest customer base is the plasma etching industry. |
| Year Established | 2004 |
| Impact | Software |
| Description | electrons driven technolgies |
| Form Of Engagement Activity | A magazine, newsletter or online publication |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Health professionals |
| Results and Impact | Given in 1-to-1 meetings with several (about 8) industrial visitors Impact has been via industrial partner in CASE award, Quantemol, who have gained customers |
| Year(s) Of Engagement Activity | 2009,2010,2011 |