A study of methods to produce MAX phases in thin films at temperatures below 700 degrees C
Lead Research Organisation:
University of Salford
Department Name: Inst for Materials Research
Abstract
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People |
ORCID iD |
| David Sheel (Principal Investigator) |
| Description | we developed a novel atmopsheric pressure CVD route to the deposition of nitride/oxynitride/carbide and oxycarbide thin films (Silicon and Titanium based compounds were mainly explored).. These were deposited at temperatures below 300C whereas conventional CVD routes would normally be between 600 to over a thousand degrees C. It is however relevant to note that these layres differed in properties from higher temperature layers -with typically lower densities and also amorphous or mostly amporphous structure. |
| Exploitation Route | We have moved this work forward within a new project (EU funded) and also integrated the deposition technology into new EPSRC bids looking at different materqailas and film functionality challenges. |
| Sectors | Aerospace, Defence and Marine,Electronics,Energy |
| Description | Within the project we supported the development of a new design plasma power supply which allowed for untra high frequency pulsing. This allowed a step change in plasma control at atmospheric pressure. A patent has been filed. |
| First Year Of Impact | 2011 |
| Sector | Aerospace, Defence and Marine,Electronics,Energy,Pharmaceuticals and Medical Biotechnology |
| Impact Types | Economic |
| Description | EU Project funding |
| Amount | £350,000 (GBP) |
| Funding ID | PLIANT |
| Organisation | European Commission |
| Sector | Public |
| Country | European Union (EU) |
| Start | 03/2013 |
| End | 02/2017 |
| Description | EU Project funding |
| Amount | € 350,000 (EUR) |
| Funding ID | PLIANT |
| Organisation | European Commission |
| Sector | Public |
| Country | European Union (EU) |
| Start | 02/2013 |
| End | 09/2017 |
| Description | European Union EU Brussels |
| Amount | £500,000 (GBP) |
| Funding ID | 309530 |
| Organisation | European Commission |
| Sector | Public |
| Country | European Union (EU) |
| Start | 03/2013 |
| End | 01/2017 |
| Description | European Union EU Brussels |
| Amount | £500,000 (GBP) |
| Funding ID | 309530 |
| Organisation | European Commission |
| Sector | Public |
| Country | European Union (EU) |
| Start | 03/2013 |
| End | 01/2017 |