CORNERSTONE 2.5
Lead Research Organisation:
University of Southampton
Department Name: Optoelectronics Research Centre (ORC)
Abstract
Silicon photonics is the manipulation of light (photons) in silicon-based substrates, analogous to electronics, which is the manipulation of electrons. The development cycle of a silicon photonics device consists of three stages: design, fabrication, and characterisation. Whilst design and characterisation can readily be done by research groups around the country, the fabrication of silicon photonics devices, circuits and systems requires large scale investments and capital equipment such as cleanrooms, lithography, etching equipment etc. Based at the Universities of Southampton and Glasgow, CORNERSTONE 2.5 will provide world-leading fabrication capability to silicon photonics researchers and the wider science community.
Whilst silicon photonics is the focus of CORNERSTONE 2.5, it will also support other technologies that utilise similar fabrication processes, such as MEMS or microfluidics, and the integration of light sources with silicon photonics integrated circuits, as well as supporting any research area that requires high-resolution lithography.
The new specialised capabilities available to researchers to support emerging applications in silicon photonics are: 1) quantum photonics based on silicon-on-insulator (SOI) wafers; 2) programmable photonics; 3) all-silicon photodetection; 4) high efficiency grating couplers for low energy, power sensitive systems; 5) enhanced sensing platforms; and 6) light source integration to the silicon nitride platform. Access will be facilitated via a multi-project-wafer (MPW) mechanism whereby multiple users' designs will be fabricated in parallel on the same wafer. This is enabled by the 8" wafer-scale processing capability centred around a deep-UV projection lithography scanner installed at the University of Southampton.
The value of CORNERSTONE 2.5 to researchers who wish to use it is enhanced by a network of supporting companies, each providing significant expertise and added value to users. Supporting companies include process-design-kit (PDK) software specialists (Luceda Photonics), reticle suppliers (Compugraphics, Photronics), packaging facilities (Tyndall National Institute, Bay Photonics, Alter Technologies), a mass production silicon photonics foundry (CompoundTek), an epitaxy partner for germanium-on-silicon growth (IQE), fabrication processing support (Oxford Instruments), an MPW broker (EUROPRACTICE), a III-V die supplier (Sivers Semiconductors) and promotion and outreach partners (Photonics Leadership Group, EPIC, CSA Catapult, CPI, Anchored In).
Access to the new capabilities will be free-of-charge to UK academics in months 13-18 of the project, and 75% subsidised by the grant in months 19-24. During the 2-year project, we will also canvas UK demand for the capability to continue to operate as an EPSRC National Research Facility, and if so, to establish a Statement of Need.
Whilst silicon photonics is the focus of CORNERSTONE 2.5, it will also support other technologies that utilise similar fabrication processes, such as MEMS or microfluidics, and the integration of light sources with silicon photonics integrated circuits, as well as supporting any research area that requires high-resolution lithography.
The new specialised capabilities available to researchers to support emerging applications in silicon photonics are: 1) quantum photonics based on silicon-on-insulator (SOI) wafers; 2) programmable photonics; 3) all-silicon photodetection; 4) high efficiency grating couplers for low energy, power sensitive systems; 5) enhanced sensing platforms; and 6) light source integration to the silicon nitride platform. Access will be facilitated via a multi-project-wafer (MPW) mechanism whereby multiple users' designs will be fabricated in parallel on the same wafer. This is enabled by the 8" wafer-scale processing capability centred around a deep-UV projection lithography scanner installed at the University of Southampton.
The value of CORNERSTONE 2.5 to researchers who wish to use it is enhanced by a network of supporting companies, each providing significant expertise and added value to users. Supporting companies include process-design-kit (PDK) software specialists (Luceda Photonics), reticle suppliers (Compugraphics, Photronics), packaging facilities (Tyndall National Institute, Bay Photonics, Alter Technologies), a mass production silicon photonics foundry (CompoundTek), an epitaxy partner for germanium-on-silicon growth (IQE), fabrication processing support (Oxford Instruments), an MPW broker (EUROPRACTICE), a III-V die supplier (Sivers Semiconductors) and promotion and outreach partners (Photonics Leadership Group, EPIC, CSA Catapult, CPI, Anchored In).
Access to the new capabilities will be free-of-charge to UK academics in months 13-18 of the project, and 75% subsidised by the grant in months 19-24. During the 2-year project, we will also canvas UK demand for the capability to continue to operate as an EPSRC National Research Facility, and if so, to establish a Statement of Need.
Organisations
- University of Southampton (Lead Research Organisation)
- Zhejiang University (Collaboration)
- University of Warwick (Collaboration)
- Shenzhen University (Collaboration)
- University College Cork (Collaboration, Project Partner)
- Ludwig Maximilian University of Munich (LMU Munich) (Collaboration)
- National Taiwan University of Science and Technology (Collaboration)
- Cambridge Consultants (Collaboration)
- Oxford Ionics (Collaboration)
- University of Texas at Austin (Collaboration)
- Bar-Ilan University (Collaboration)
- National Sun Yat-sen University (Collaboration)
- Oxford Instruments (United Kingdom) (Collaboration, Project Partner)
- KING'S COLLEGE LONDON (Collaboration)
- Huawei Technologies (Collaboration)
- University of Vigo (Collaboration)
- University of South Wales (Collaboration, Project Partner)
- Chinese University of Hong Kong (Collaboration)
- Koc University (Collaboration)
- Rockley Photonics (Collaboration)
- Vrije Universiteit Brussel (Collaboration)
- Compound Semiconductor Applications Catapult (Collaboration)
- Hokkaido University (Collaboration, Project Partner)
- ORCA Computing (Collaboration)
- Renishaw (United Kingdom) (Collaboration)
- IMPERIAL COLLEGE LONDON (Collaboration)
- EPIC (Electronics & Photonics Innov Ctr) (Project Partner)
- Beamlet LLC (Project Partner)
- Luceda Photonics (Project Partner)
- Quantum Dice (Project Partner)
- Polytechnic University of Bari (Project Partner)
- Wave Photonics (Project Partner)
- Duality Quantum Photonics Ltd (Project Partner)
- Photonics Leadership Group (Project Partner)
- University of Bath (Project Partner)
- Centre for Process Innovation (Project Partner)
- University of Malaga (Project Partner)
- Bangor University (Project Partner)
- Fudan University (Project Partner)
- Chinese University of Hong Kong (Project Partner)
- University College London (Project Partner)
- Newcastle University (Project Partner)
- Compugraphics (United Kingdom) (Project Partner)
- Sivers Photonics Ltd (Project Partner)
- University of Birmingham (Project Partner)
- Airbus (United Kingdom) (Project Partner)
- University of Bristol (Project Partner)
- Rockley Photonics Limited (UK) (Project Partner)
- Consorzio Nazionale Interuniversitario per le Telecomunicazioni (Project Partner)
- Photronics (U K) Ltd (Project Partner)
- OnPoint Digital Solutions (Project Partner)
- City, University of London (Project Partner)
- University of Huddersfield (Project Partner)
- Huawei Technologies (Germany) (Project Partner)
- Pointcloud (Project Partner)
- EUROPRACTICE (International) (Project Partner)
- CARDIFF UNIVERSITY (Project Partner)
- Camgraphic Ltd (Project Partner)
- University of Sydney (Project Partner)
- Compound Semiconductor App. Catapult (Project Partner)
- University of Sussex (Project Partner)
- Imperial College London (Project Partner)
- Czech Technical University in Prague (Project Partner)
- Zero Point Motion Ltd (Project Partner)
- Loughborough University (Project Partner)
- CompoundTek Pte Ltd (Project Partner)
- University of St Andrews (Project Partner)
- University of Oxford (Project Partner)
- IQE (United Kingdom) (Project Partner)
- University of Strathclyde (Project Partner)
- Lancaster University (Project Partner)
- Alter Technology TUV Nord (Project Partner)
- University of York (Project Partner)
- University of Manchester (Project Partner)
- University of Sheffield (Project Partner)
- Royal Holloway University of London (Project Partner)
- Queen's University Belfast (Project Partner)
- Nanyang Technological University (Project Partner)
- Heriot-Watt University (Project Partner)
- University of Cambridge (Project Partner)
- Anchored In Ltd (Project Partner)
- Durham University (Project Partner)
- Resolute Photonics (UK) Ltd (Project Partner)
- Bay Photonics Ltd (Project Partner)
Publications
Burridge B
(2023)
Integrate and scale: a source of spectrally separable photon pairs
in Optica
Hashemi Talkhooncheh A
(2023)
A 100-Gb/s PAM4 Optical Transmitter in a 3-D-Integrated SiPh-CMOS Platform Using Segmented MOSCAP Modulators
in IEEE Journal of Solid-State Circuits
Hou Y
(2023)
Surface/interface engineering of InAs quantum dot edge-emitting diodes toward III-V/SiN photonic integration
in Journal of Luminescence
Li K
(2023)
An integrated CMOS-silicon photonics transmitter with a 112 gigabaud transmission and picojoule per bit energy efficiency
in Nature Electronics
Mashanovich G
(2023)
Education and training of silicon photonics engineers and technicians
Muthuganesan H
(2023)
100 Gbps PAM4 ultra-thin photodetectors integrated on SOI platform by micro transfer printing
in Optics Express
Muthuganesan H
(2023)
Micro-transfer printed InGaAs photodetector on SOI platform
| Description | Excellent progress within the cornerstone foundry service. All new platforms have been launched bar 1, which is imminent. User numbers continue to rise significantly. Word of mouth continues to promote the CORNERSTONE brand. This year, for the first time, this has resulted in more industry users than academic users. Record numbers of users utilised the SiN platform this year, demonstrating that demand for this platform is very significant. Results of the SOI platform has resulted in the world's fasted silicon photonics transmitter (with integrated driver), as well as the world's fastest MOSCAP modulator. |
| Exploitation Route | The success of the CORNERSTONE has already led to a succesful IKC bid. This was one of the first investments announced, associated with the UK Semiconductor Strategy. Minister Saqib Bhatti MP, visited Southampton to announce the new IKC awards on 5th February 2024. |
| Sectors | Digital/Communication/Information Technologies (including Software) Energy Environment Healthcare Manufacturing including Industrial Biotechology Pharmaceuticals and Medical Biotechnology Transport |
| URL | https://www.cornerstone.sotonfab.co.uk/ |
| Description | Numerous users has been able to use the CORNERSTONE platforms to demonstrate proof of principle o their ideas. This includes some start-up companies, which has enabled them to seek funding and expand. One such example is Zero Point Motion, led by CEO Lia Li. The company is developing inertial sensors, combining MEMS with Silicon Photonics, and they cite CORNERSTONE as instrumental in theirdevelopment. They now employ 12 people in the UK. Another start-up, Pointcloud inc, uses CORNERSTONE to develop their technology prior to scaling up into foundry tape-outs. Numerous other users are at earlier stages in their journey. This year, for the first time, there were more industry users than academic users, demonstrating the commercial impact of the work. |
| First Year Of Impact | 2023 |
| Sector | Digital/Communication/Information Technologies (including Software),Energy,Environment,Healthcare,Manufacturing, including Industrial Biotechology,Pharmaceuticals and Medical Biotechnology,Transport |
| Impact Types | Cultural Economic |
| Description | CORNERSTONE 2.5 |
| Amount | £1,538,492 (GBP) |
| Funding ID | EP/W035995/1 |
| Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 12/2022 |
| End | 12/2024 |
| Description | CORNERSTONE 2.5 Enterprise Income - Akhetonics |
| Amount | £47,960 (GBP) |
| Organisation | Akhetonics |
| Sector | Private |
| Country | Germany |
| Start | 06/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - Bar Ilan University |
| Amount | £100 (GBP) |
| Organisation | Bar-Ilan University |
| Sector | Academic/University |
| Country | Israel |
| Start | 02/2024 |
| Description | CORNERSTONE 2.5 Enterprise Income - CSA Catapult |
| Amount | £22,410 (GBP) |
| Organisation | Compound Semiconductor Applications Catapult |
| Sector | Private |
| Country | United Kingdom |
| Start | 03/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - Cambridge Consultants |
| Amount | £14,250 (GBP) |
| Organisation | Cambridge Consultants |
| Sector | Private |
| Country | United Kingdom |
| Start | 02/2024 |
| Description | CORNERSTONE 2.5 Enterprise Income - Cardiff University |
| Amount | £10,250 (GBP) |
| Organisation | Cardiff University |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 02/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - Hokkaido University |
| Amount | £19,450 (GBP) |
| Organisation | Hokkaido University |
| Sector | Academic/University |
| Country | Japan |
| Start | 06/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - National Sun Yat-sen University |
| Amount | £23,800 (GBP) |
| Organisation | National Sun Yat-sen University |
| Sector | Academic/University |
| Country | Taiwan, Province of China |
| Start | 01/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - National Taiwan University of Science Technology |
| Amount | £5,250 (GBP) |
| Organisation | National Taiwan University of Science and Technology |
| Sector | Academic/University |
| Country | Taiwan, Province of China |
| Start | 03/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - ORCA Computing |
| Amount | £875 (GBP) |
| Organisation | ORCA Computing |
| Sector | Private |
| Country | United Kingdom |
| Start | 11/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - Oxford Ionics |
| Amount | £3,800 (GBP) |
| Organisation | Oxford Ionics |
| Sector | Private |
| Start | 01/2021 |
| Description | CORNERSTONE 2.5 Enterprise Income - Queens University |
| Amount | £2,496 (GBP) |
| Organisation | Queens University |
| Sector | Academic/University |
| Country | Bangladesh |
| Start | 04/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - Renishaw |
| Amount | £5,800 (GBP) |
| Organisation | Renishaw PLC |
| Sector | Private |
| Country | United Kingdom |
| Start | 12/2022 |
| Description | CORNERSTONE 2.5 Enterprise Income - University of Bristol |
| Amount | £18,820 (GBP) |
| Organisation | University of Bristol |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 03/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - University of Cambridge |
| Amount | £16,530 (GBP) |
| Organisation | University of Cambridge |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 02/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - University of Manchester |
| Amount | £1,750 (GBP) |
| Organisation | University of Manchester |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 11/2023 |
| Description | CORNERSTONE 2.5 Enterprise Income - University of Texas |
| Amount | £8,600 (GBP) |
| Organisation | University of Texas at Austin |
| Sector | Academic/University |
| Country | United States |
| Start | 07/2023 |
| Description | CORNERSTONE Photonics Innovation Centre (C-PIC) |
| Amount | £10,998,902 (GBP) |
| Funding ID | EP/Z531066/1 |
| Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 03/2024 |
| End | 03/2029 |
| Description | EQUINOX |
| Amount | £2,239,643 (GBP) |
| Funding ID | 10102939 |
| Organisation | Innovate UK |
| Sector | Public |
| Country | United Kingdom |
| Start | 03/2024 |
| End | 09/2025 |
| Description | Photonic Integrated Circuit Bootcamp |
| Amount | £334,888 (GBP) |
| Funding ID | 10074923 |
| Organisation | Innovate UK |
| Sector | Public |
| Country | United Kingdom |
| Start | 08/2023 |
| End | 02/2025 |
| Description | Silicon Nitride for Quantum Computing (SiNQ) |
| Amount | £422,419 (GBP) |
| Funding ID | 10074567 |
| Organisation | Innovate UK |
| Sector | Public |
| Country | United Kingdom |
| Start | 08/2023 |
| End | 02/2025 |
| Title | Open source Process Design Kit (PDK) of silicon photonics components |
| Description | The world's first open source database of silicon photonics components for a variety of silicon photonics platforms which enables other researchers to design circuits based on existing components with a known functionality and peformance. |
| Type Of Material | Computer model/algorithm |
| Year Produced | 2018 |
| Provided To Others? | Yes |
| Impact | Economic impact from increased number of paying users to the CORNERSTONE fabrication service |
| URL | https://www.cornerstone.sotonfab.co.uk/design-rules/ |
| Description | CORNERSTONE 2 User: Kings College London |
| Organisation | King's College London |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2022 |
| Description | CORNERSTONE 2 User: Koc University |
| Organisation | Koc University |
| Country | Turkey |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2022 |
| Description | CORNERSTONE 2 User: LMU Munich |
| Organisation | Ludwig Maximilian University of Munich (LMU Munich) |
| Country | Germany |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2022 |
| Description | CORNERSTONE 2 User: National Taiwan University of Science Technology |
| Organisation | National Taiwan University of Science and Technology |
| Country | Taiwan, Province of China |
| Sector | Academic/University |
| PI Contribution | Fabrication of SOI photonics chip |
| Collaborator Contribution | Design of SOI photonics chip |
| Impact | / |
| Start Year | 2022 |
| Description | CORNERSTONE 2 User: Oxford Instruments |
| Organisation | Oxford Instruments |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2021 |
| Description | CORNERSTONE 2 User: Renishaw |
| Organisation | Renishaw PLC |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2022 |
| Description | CORNERSTONE 2 User: Rockley Photonics |
| Organisation | Rockley Photonics |
| Country | United States |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2021 |
| Description | CORNERSTONE 2 User: Shenzhen University |
| Organisation | Shenzhen University |
| Country | China |
| Sector | Academic/University |
| PI Contribution | Fabrication of germanium photonics chip |
| Collaborator Contribution | Design of germanium photonics chip |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2 User: University South Wales |
| Organisation | University of South Wales |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2021 |
| Description | CORNERSTONE 2 User: University of Warwick |
| Organisation | University of Warwick |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | Fabrication of SOI photonics chip |
| Collaborator Contribution | Design of SOI photonics chip |
| Impact | / |
| Start Year | 2021 |
| Description | CORNERSTONE 2 User: Vrije Universiteit Brussels |
| Organisation | Vrije Universiteit Brussel |
| Country | Belgium |
| Sector | Academic/University |
| PI Contribution | Fabrication of SOI photonics chip |
| Collaborator Contribution | Design of SOI photonics chip |
| Impact | / |
| Start Year | 2022 |
| Description | CORNERSTONE 2 User: Zhejiang University |
| Organisation | Zhejiang University |
| Country | China |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2020 |
| Description | CORNERSTONE 2.5 User: Bar Ilan University |
| Organisation | Bar-Ilan University |
| Country | Israel |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2024 |
| Description | CORNERSTONE 2.5 User: Cambridge Consultants |
| Organisation | Cambridge Consultants |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2.5 User: Hokkaido University |
| Organisation | Hokkaido University |
| Country | Japan |
| Sector | Academic/University |
| PI Contribution | Fabrication of SOI chips |
| Collaborator Contribution | Design of SOI chips |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2.5 User: Imperial College London |
| Organisation | Imperial College London |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | Design of PICs |
| Collaborator Contribution | Fabrication of PICs |
| Impact | / |
| Start Year | 2021 |
| Description | CORNERSTONE 2.5 User: National Sun Yat-sen University |
| Organisation | National Sun Yat-sen University |
| Country | Taiwan, Province of China |
| Sector | Academic/University |
| PI Contribution | Fabrication of SiN photonics chip |
| Collaborator Contribution | Design of SiN photonics chip |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2.5 User: ORCA Computing |
| Organisation | ORCA Computing |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | PhotonHub Training course provided |
| Collaborator Contribution | PhotonHub Training course received |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2.5 User: Oxford Ionics |
| Organisation | Oxford Ionics |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2.5 User: Universidad de Vigo |
| Organisation | University of Vigo |
| Country | Spain |
| Sector | Academic/University |
| PI Contribution | PhotonHub Training course provided |
| Collaborator Contribution | PhotonHub Training course received |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE 2.5 User: University of Texas |
| Organisation | University of Texas at Austin |
| Country | United States |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2023 |
| Description | CORNERSTONE User: CSA Catapult |
| Organisation | Compound Semiconductor Applications Catapult |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2019 |
| Description | CORNERSTONE User: Chinese University of Hong Kong |
| Organisation | Chinese University of Hong Kong |
| Country | Hong Kong |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2019 |
| Description | CORNERSTONE User: Huawei |
| Organisation | Huawei Technologies |
| Country | China |
| Sector | Private |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2020 |
| Description | CORNERSTONE User: Tyndall |
| Organisation | University College Cork |
| Department | Tyndall National Institute |
| Country | Ireland |
| Sector | Academic/University |
| PI Contribution | Fabrication of PICs |
| Collaborator Contribution | Design of PICs |
| Impact | / |
| Start Year | 2019 |