Investigation in to Nano Contacts with applications towards lithography

Lead Research Organisation: University of Sheffield
Department Name: Mechanical Engineering

Abstract

Project Summary:

The project will seek to investigate a magnitude of contact and wear mechanisms at a Nano-Level in mainly Silicon based materials. Material characteristic and behaviours cannot necessarily be scaled down in a linear nature from larger scales.

Utilising a variety of techniques, not least a newly installed in-situ SEM indenter the properties of mainly Silicon based materials will be explored. From here the complex nature of tribological functions between asperity contacts can be investigated and thus hopefully the influencing factors of said mechanisms be manipulated.
Material selection and coatings will be critical throughout the investigation and will form a key experimental aspect of the project.

The main areas of industrial impact will be when applied to Nanolithography and other semiconductor productions steps.

Planned Impact

The impact of the Centre will be manifest itself in four ways; by the number and quality of skilled PhD graduates it produces, by the reach and significance of the research that is generated during their studies, by the contribution to the research base in tribology, and through the broader societal impact of improved machine efficiency and energy utilisation.

The number and quality of PhD graduates. iT-CDT plans, in the steady state, to graduate 12 PhD students per year. We expect these students to enter industry as research leaders or academia as RAs then lecturers. UK and EU industries are desperately short of PhD graduates, and they are in demand. We expect to have impact on UK industry with a stream of PhD graduates who will enter for example, the automotive sector (e.g. designing more fuel efficient engines), the rail sector (e.g. increasing network capacity and reducing cost through improved track and vehicle components), the oil industry (e.g. developing new lubricants for increased fuel efficiency), aerospace sector (e.g. tribology needs in jet engines), the power industries (e.g.developing and maintaining more efficient transmissions). PhD students may also commercialise technology or consultancy in the form of a spin-out activity. We have a track record of past PhD students achieving all these things. The iT-CDT plans to extend and broaden that record, will facilitate synergy across the discipline.

The transformative PhD research. During their studies, PhD students will be conducting research on an industry led project. These projects will also have elements of generic application therefore have wide impact. The students will be closely involved with both the sponsoring organisation and other industrial partners. This means that there will be a direct route for technology transfer.

Contribution to the Research Base in Tribology. The iT-CDT is a grouping of the two leading universities in tribology in the UK. It will form the largest critical mass of academics, RAs, and PhD students in the EU. A team of industrial partners will steer the research so that it is relevant and has real routes to impact. This platform will lead to a growth in the research base in tribology for the UK and will impact both industry, with improved products and processes, and academia with the supply of new technology and analytical methods.

Societal Impact. The development of new tribological processes, and engineers skilled in their conception and implementation, will have broader societal impact with machines and process that run with lower friction, higher energy efficiency and have greater durability. In the shorter term, we also plan as part of the iT-CDT for public engagement events using PhD students as the agents of delivery.

Publications

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