One-step air bridge fabrication technique using 3D e-beam lithography (2013)

First Author: Papageorgiou, V.
Attributed to:  Electronics Design Centre for Heterogeneous Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract

Volume: 39

Parent Publication: MNE2013: 39th International Conference on Micro and Nano Engineering