One-step air bridge fabrication technique using 3D e-beam lithography (2013)
Attributed to:
Novel Thermal Management of Power Electronic Devices: High Power High Frequency Planar Gunn Diodes
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Type: Conference/Paper/Proceeding/Abstract
Volume: 39
Parent Publication: MNE2013: 39th International Conference on Micro and Nano Engineering