Low Pressure Chemical Vapour Deposition of Crystalline Ga2Te3 and Ga2Se3 Thin Films from Single Source Precursors Using Telluroether and Selenoether Complexes (2013)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.phpro.2013.07.056

Publication URI: http://dx.doi.org/10.1016/j.phpro.2013.07.056

Type: Journal Article/Review

Parent Publication: Physics Procedia