Rapid microcantilever-thickness determination by optical interferometry (2014)

First Author: Salmon A

Attributed to: Soft NanoPhotonics Programme Grant (sNaP) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-0233/25/1/015202

Publication URI: http://dx.doi.org/10.1088/0957-0233/25/1/015202

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 1