Thinning of N-face GaN (0001 ¯) samples by inductively coupled plasma etching and chemomechanical polishing (2007)

First Author: Rizzi F
Attributed to:  Materials Challenges in GaN-based Light Emitting Structures funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.2433987

Publication URI: http://dx.doi.org/10.1116/1.2433987

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 2