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Space charge, plasma potential and electric field distributions in HiPIMS discharges of varying configuration (2013)

First Author: Liebig B

Attributed to: A New Route to high-Performance Functional Films on Polymeric Web funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/22/4/045020

Publication URI: http://dx.doi.org/10.1088/0963-0252/22/4/045020

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 4