Negative ion energy distributions in reactive HiPIMS (2013)

First Author: Bowes M
Attributed to:  A New Route to high-Performance Functional Films on Polymeric Web funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/46/4/045204

Publication URI: http://dx.doi.org/10.1088/0022-3727/46/4/045204

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 4