The spatial distribution of negative oxygen ion densities in a dc reactive magnetron discharge (2013)

First Author: Scribbins S

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/46/4/045203

Publication URI: http://dx.doi.org/10.1088/0022-3727/46/4/045203

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 4