The effect of oxygen incorporation in sputtered scandium nitride films (2008)
Attributed to:
Materials Challenges in GaN-based Light Emitting Structures
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2008.05.050
Publication URI: http://dx.doi.org/10.1016/j.tsf.2008.05.050
Type: Journal Article/Review
Parent Publication: Thin Solid Films
Issue: 23