Assessment of the performance of scanning capacitance microscopy for n-type gallium nitride (2008)

First Author: Sumner J

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.2890705

Publication URI: http://dx.doi.org/10.1116/1.2890705

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Issue: 2