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On the identification of the oxygen vacancy in HfO2 (2011)

First Author: Clark S

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2011.03.078

Publication URI: http://dx.doi.org/10.1016/j.mee.2011.03.078

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering

Issue: 7