High resolution dopant profiling in the SEM, image widths and surface band-bending (2008)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1742-6596/126/1/012033
Publication URI: http://dx.doi.org/10.1088/1742-6596/126/1/012033
Type: Journal Article/Review
Parent Publication: Journal of Physics: Conference Series