Control of stress in tantalum thin films for the fabrication of 3D MEMS structures (2013)

First Author: Mastropaolo E
Attributed to:  A multichannel adaptive integrated MEMS/CMOS microphone funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.4824697

Publication URI: http://dx.doi.org/10.1116/1.4824697

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Issue: 6