A quantitative model for doping contrast in the scanning electron microscope using calculated potential distributions and Monte Carlo simulations (2011)

First Author: Chee A

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 1