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A quantitative model for doping contrast in the scanning electron microscope using calculated potential distributions and Monte Carlo simulations (2011)

First Author: Chee A

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.3524186

Publication URI: http://dx.doi.org/10.1063/1.3524186

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 1