Site-selective dopant profiling of p-n junction specimens in the dual-beam FIB/SEM system (2010)

First Author: Chee K

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: Journal of Physics: Conference Series