Microplasma copolymerization of amine and Si containing precursors (2014)

First Author: Bashir M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2014.06.004

Publication URI: http://dx.doi.org/10.1016/j.tsf.2014.06.004

Type: Journal Article/Review

Parent Publication: Thin Solid Films