Electron beam lithography for high density meta fish scale operational at optical frequency (2009)

First Author: Chen Y
Attributed to:  NANOSTRUCTURED METAFILMS: A NEW PARADIGM FOR PHOTONICS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2008.11.094

Publication URI: http://dx.doi.org/10.1016/j.mee.2008.11.094

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering

Issue: 4-6