Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications (2012)

First Author: Sultan S

Attributed to: NANOSTRUCTURED PHOTONIC METAMATERIALS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2012.04.019

Publication URI: http://dx.doi.org/10.1016/j.mee.2012.04.019

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering