Anisotropic electrostatic actuation (2009)

First Author: Corbett D

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/42/11/115505

Publication URI: http://dx.doi.org/10.1088/0022-3727/42/11/115505

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 11