Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines (2014)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Type: Conference/Paper/Proceeding/Abstract
Parent Publication: 8th Hot-wire (Cat) Chemical Vapor Deposition Conference