Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer (2012)

First Author: Zeimpekis I
Attributed to:  Laser Induced Beams of Radiation and their Applications (LIBRA funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2012.2196491

Publication URI: http://dx.doi.org/10.1109/jmems.2012.2196491

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 5