Defects evolution and dopant activation anomalies in ion implanted silicon (2006)

First Author: Cristiano F
Attributed to:  University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.nimb.2006.10.046

Publication URI: http://dx.doi.org/10.1016/j.nimb.2006.10.046

Type: Journal Article/Review

Parent Publication: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Issue: 1-2