Fluorine-vacancy complexes in ultrashallow B-implanted Si (2006)

First Author: Abdulmalik D

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2335594

Publication URI: http://dx.doi.org/10.1063/1.2335594

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 5