Proton beam lithography at the University of Surrey's Ion Beam Centre (2006)
Attributed to:
University of Surrey Ion Beam Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.nimb.2005.08.128
Publication URI: http://dx.doi.org/10.1016/j.nimb.2005.08.128
Type: Journal Article/Review
Parent Publication: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Issue: 1-2